Spotlight on Ion Implantation and Rapid Thermal Processing Solutions from Advanced Energy

Back-end-of-the-line semiconductor fabrication processes, in which lithography and multi-pattern etching is executed, might get a lot of attention, but it’s the front-end-of-the-line processing that sets the foundation for success. That’s where ion implantation and rapid thermal processing (RPT) come in. Think of it like a really good rock-and-roll band: The lead singer may be the …